A Novel TRM Calibration Method for Improvement of Modelling Accuracy at mm-Wave Frequency
A novel TRM calibration procedure aimed to improve the quality of on-wafer S-parameter measurement, especially in mm-wave frequency band, has been proposed. This procedure is based on active reverse signal injections to improve the accuracy of the raw thru s-parameter measurement. This calibration method can effectively improve the S-parameter measurement quality at mm-wave frequency and hence improve the modelling accuracy. This new optimized calibration method eliminates the need of utilizing complex and expensive load-pull system or post calibration optimization algorithms, and can be easily implemented in modelling extraction process or further implemented into other LRL/TRL based calibration algorithms. Finally, this proposed method has been tested on a real measurement system over a 16nm FinFET CMOS device to test its validity.