Miniature Antenna Probe System for 140–220GHz On-Wafer Radiation Pattern Measurements

On-chip antennas (OCAs) have been widely used in millimeter and submillimeter transceiver MMICs. However, OCA radiation patterns are difficult to measure due to low antenna efficiency and high path loss. We had developed a 140–220 GHz antenna probe system to investigate OCA frontside and backside radiation patterns. The results suggest that most radiation of antennas on silicon-based MMICs is likely toward the backside. Moreover, the probe station supports on-wafer measurements as a powerful tool to evaluate OCA performance.