1.7GHz Y-Cut Lithium Niobate MEMS Resonators with FoM of 336 and f·Q of 9.15×1012
This work presents a new class of microelectromechanical system (MEMS) resonators enabled by Y-cut lithium niobate (LiNbO3) thin films. In operation, the devices are excited into the first order antisymmetric (A1) mode vibration. The fabricated MEMS resonator has demonstrated a large effective electromechanical coupling (kt2) of 6.3% and a high quality factor (Q) of 5341, hence resulting in an extremely high figure of merit (FoM= kt2·Q) of 336 at 1.7 GHz. Additionally, this work also marks the highest experimental f·Q product of 9.15×1012 Hz for state-of-the-art MEMS resonators based on transferred lithium niobate thin films.