Towards Improved Manufacturing Yield of Acoustic-Wave Ladder-Type Filters

Monte Carlo (MC) analysis and yield optimization methods are often used to describe the manufacturing process variability as a means to estimate production yield in various disciplines of semiconductor industry, however are not quite employed or fall into disuse at the design and development phases of acoustic-wave (AW) filters and multiplexers. In this study, MC yield analysis approach is exploited as a design centering method to obtain high yield estimate. An illustrative example of Band 41 surface acoustic-wave (SAW) ladder-type filter is utilized to demonstrate the advantages of the presented approach.